CXC 80 - Ultra Precision

★ Guide- Circular linear ball guiding, Gothic arc-groove formed by dual arc-grooves individually on upper and lower rails of body. Ball moving in single groove is structured by 2 points-contact, and total 4contact points in dual arc-groove to form strong rail constructure.
★ Transmission Parts-Ball screw, It transmits through the ball involving in the locknut and screw to reach the accuracy and longer operation lifetime.
★ Material-Stainless Steel

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Update：2022.3.24

Model No.			CXC80
Mechanical Spec.	Table Size (mm)		80X80
	Travel Stroke (mm)		30	50	75	100
	Drive Type		Ball Screw Ø8，lead 1mm		Ball Screw Ø8，lead 2mm
	Rail		Circular Linear Ball Guiding
	Stage Material / Surface Treatment		Stainless Steel / Nickel plating
	Accuracy Level		OP：Ultra Precision
	Wiring Method		N：GMT Standard
Precision Spec.	Resolution(Pulse) (µm)		M: 1 (Full)；0.5 (Half) J: 2 (Full)；1 (Half)		M: 2 (Full)；1 (Half) J: 4 (Full)；2 (Half)
	Max. Speed(Full Step) (mm/sec)		15		30
	Positioning Precision (µm)		5		7	10
	Repeatability Precision(µm)		±0.5
	Multi-point Repeatability Precision(µm)		A: 1.5 / B: 1
	Load Capacity (Kgf)		16
	Missed Step (µm)		1
	Moment Stiffness		Pitch: 0.05 / Yaw: 0.05 / Rolling: 0.05 ("/N-cm)
	Pitch / Yaw		Pitch: < 20" / Yaw: < 15"
	Parallelism (µm)		20
	Dynamic Straightness (µm)		2			4
	Dynamic Parallelism (µm)		10
Electrical Spec.	Motor	Type / Shaft Numbers	M: 5-phase stepper high-resolution motor / ☐28 double shafts J: 5-phase stepper motor / ☐28 double shafts
		Brand / Model	M: Orientalmotor / PKP523MN07B J: Orientalmotor / PKP523N12B
	Driver Brand / Model		Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options)
	Connector	Stage Side Connector	15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
		Controller Side Connector	15-Pin female end connetor D-SUB (Additional options) / 12-Pin female end connetor HRS (Additional options)
	Sensor	Origin Sensor	Photoelectric sensor GMT-sensor
		Limit Sensor
		Origin Approximation Sensor	N / A
		Power Voltage	24V±10%
		Control Output	NPN open collector output under 24V 8mA
		Output Control	Testing (sensing)：output transistor OFF (closed)

Multi-point repeated positioning accuracy

♦ Accuracy measurement description

1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual
The difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code
degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.

♦ Precision introduction

1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points
The amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.

System Configuration Diagram

♦ For detailed specifications, please read the description for the stage and connecting cable.

♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog.

♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs.

Axis Definition

GMT has defined different axis as the following figuration according to the movement direction:

Horizontal movement direction is X and Y axis.

Vertical movement direction is Z axis.

Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.

Green arrows present the specified axis movement direction.

CXC 80 - Ultra Precision

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