Type | Item | Parameter |
Equipment Dimensions
& Power | Power Input | 220V 50/60Hz |
| Pneumatic System | Compressed air flow >500PM; System supply pressure 0.6MPa-0.7MPa |
| Vacuum System | Vacuum gauge reading -53 ~ -100kPa |
| Environmental Conditions | Temperature: 15-35°C; Humidity: standard 60% at 22°C; Cleanliness level: 10k Class |
| Machine Dimensions | 1660mm×1610mm×1550mm |
| Equipment Weight | 1500kg |
| Safety Protection | Product Safety Protection | Contact grounding treatment |
| ESD Protection | Ion fan for electrostatic removal |
| Software Protection | Mistake proofing |
| Equipment Protection | Collision prevention, axis stroke limit, distance sensor |
| Operator Safety Protection | Protective goggles |
Motion and
Positioning Systems
(coarse positioning) | Operating module | Dual 6 axis module |
| Workpiece Clamping | Electric clamp, vacuum suction fixation |
Repeatability
XYZ Drive Mechanism | ±0.05μm
Step motor with ball screw |
| XYZ motion stroke | ±15mm |
| Maximum movement speed | 15mm/s |
Motion and
Positioning Systems
(fine positioning) | Control axis | XYZ axis |
| Resolution | 2nm |
Bi-directional repeatability
(10% movement range) | 5nm |
| Alignment System | Scan time - spiral area 10 µm | <0.5s |
| Scan time - gradient ±5 µm | <0.3s |
| Repeatability | 0.02dB |
| Z-axis Sensing System | Sensing range | 2.4mm |
| Resolution | 24nm |
Microscope
Movement System | Travel Distance | XY axis 50mm; Z axis 127mm |
| Resolution | 1μm |
| Repeatability | ±3μm |
Probe Station System
(XYZ platform) | Travel Distance | X axis 350mm; Y axis 365mm; Z axis 20mm |
| Resolution | 0.1μm |
| Repeatability | ±1μm |
| Accuracy | ±2μm |
Probe Station System
(Theta platform) | Travel Distance | ±10° |
| Resolution | 0.0001° |
| Repeatability | 0.0005° |
| Accuracy | 0.001° |
| Wafer chuck | Diameter | 310mm |
| Surface flatness | ±10μm |
| Test object size capability | single DUT ,2 ,4, 6 ,8 ,12 inch |
Temperature
control system | Temperature controllable range | Recommended operating range -40°C to 100°C,
Extended Maximum Temperature Up to 300°C |
| Heating and cooling rate | Heating: -40°C to 25°C < 30 min; 25°C to 300°C < 50 min
Cooling: 300°C to 25°C < 60min; 25°C to -40°C <60 min |
-01_4.jpeg "iGMT App")
