XYZ Three-Axis Motion Module

• Modular Stackable Design：Configurable in multiple layouts to meet diverse customer requirements. Each axis is built as an independent module for flexible integration.
• Direct-Drive Precision：Equipped with high-rigidity linear guides and high-performance drivers. Achieves sub-100-nanometer repeatability and positioning accuracy.
• Broad Application Range：Ideal for fiber coupling, precision inspection, semiconductor testing, IC packaging, object measurement, and micro-engineering tasks.

Ship to

Shipping Method

Name

Estimated Delivery

Price

No shipping options

Model	GNTXYZT-100-100-60-OP-0000			GNTXYZT-160-160-60-OP-0000
Axis	X	Y	Z	X	Y	Z
Payload	Y+Z+10 kg	Z+10 kg	10 kg	Y+Z+10 kg	Z+10 kg	10 kg
Stroke	100 mm	100 mm	60 mm	160 mm	160 mm	60 mm
Accuracy	± 0.3 µm	± 0.3 µm	± 0.3 arc-sec	± 0.3 µm	± 0.3 µm	± 0.3 arc-sec
Repeatability	± 0.15 µm	± 0.15 µm	± 0.15 arc-sec	± 0.15 µm	± 0.15 µm	± 0.15 arc-sec
Horizontal Straightness	± 2 µm	± 2 µm	± 2.5 µm	± 2 µm	± 2 µm	± 2.5 µm
XY Orthogonality	15 are-sec		--	15 are-sec		--
YZ Orthogonality	--	15 are-sec		--	15 are-sec
Jitter	± 20 nm	± 20 nm	± 20 nm	± 20 nm	± 20 nm	± 20 nm
Continue Force	26.7 N	26.7 N	26.7 N	26.7 N	26.7 N	26.7 N
Peak Force	133.4 N	133.4 N	133.4 N-m	133.4 N	133.4 N	133.4 N-m
Current	1.6 Arms	1.6 Arms	1.6 Arms	1.6 Arms	1.6 Arms	1.6 Arms
Peak Current	8 Arms	8 Arms	8 Arms	8 Arms	8 Arms	8 Arms
Resistance	8.3 ohms	8.3 ohms	8.3 ohms	8.3 ohms	8.3 ohms	8.3 ohms
Inductor	1.8 mH	1.8 mH	1.8 mH	1.8 mH	1.8 mH	1.8 mH
Time Constant	0.21ms	0.21ms	0.21ms	0.21ms	0.21ms	0.21ms
Back EMF Constant	13.9 V/(m/s)	13.9 V/(m/s)	13.9 V/(m/s)	13.9 V/(m/s)	13.9 V/(m/s)	13.9 V/(m/s)
Encoder type	optics, increment, analog(20 nm)	optics, increment, analog(20 nm)	optics, increment, analog(20 nm)	optics, increment, analog(20 nm)	optics, increment, analog(20 nm)	optics, increment, analog(20 nm)

XYZ Three-Axis Motion Module

Payment options